Infrared and Laser Engineering, Volume. 51, Issue 12, 20220225(2022)

Research on the characteristics of AlGaN/GaN HEMT terahertz detector array cooled by liquid nitrogen

Hao Wu1,2,3, Yifan Zhu1,3,4, Qingfeng Ding1,2,3, Jinfeng Zhang1,3, Yang Shangguan1,3, Jiandong Sun1,3, and Hua Qin1,2,3
Author Affiliations
  • 1Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
  • 2School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
  • 3Key Laboratory of Nanodevices of Jiangsu Province, Key Laboratory of Nanodevices and Applications, Chinese Academy of Sciences, Suzhou 215123, China
  • 4School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China
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    In order to take full advantage of the high electron mobility of the AlGaN/GaN high-electron-mobility transistor (HEMT) terahertz detector array, the detection characteristics of the HEMT terahertz detector array at 77 K are studied. A low temperature system suitable for the focal-plane array (FPA) chip is built based on liquid nitrogen Dewar. Comparison tests of the FPA at room temperature and low temperature is realized. When the temperature is lowered from 300 K to 77 K, the average responsivity of the detector array pixels increase by about 3 times, the average noise increases slightly, and the average noise-equivalent power (NEP) is reduced from 45.1 pW/Hz1/2 to 19.4 pW/Hz1/2 at 340 GHz, i.e., the sensitivity is more than doubled. Compared with the single detector coupled with silicon lens, there is still a lot of room for improving the sensitivity of array pixels. It is mainly due to the inconsistency of the optimal working voltage of each pixel, that leads to a large dispersion of the responsivity and noise between pixels under a given unified working voltage. Possible solutions to the problem of inconsistent optimal working voltage are discussed in this paper.

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    Hao Wu, Yifan Zhu, Qingfeng Ding, Jinfeng Zhang, Yang Shangguan, Jiandong Sun, Hua Qin. Research on the characteristics of AlGaN/GaN HEMT terahertz detector array cooled by liquid nitrogen[J]. Infrared and Laser Engineering, 2022, 51(12): 20220225

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    Paper Information

    Category: Terahertz

    Received: Mar. 29, 2022

    Accepted: --

    Published Online: Jan. 10, 2023

    The Author Email:

    DOI:10.3788/IRLA20220225

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