To provide building blocks for high-performance Micro-electro-mechanical System (MEMS) devices, Layer-by-layer (LbL) self-assembly of Single-walled Carbon Nanotube (SWNT)/polymer films was proposed and their properties were characterized and tested. The surface morphologies of the SWNT/polymer films observed under a Scanning Electron Microscope(SEM) show high strength, dense and random network structures. Raman spectra of all characteristic peaks for the SWNT in radial breathing mode, disorder mode and tangential mode demonstrate the presence of the SWNT in overall good quality and a loading state. Real time Quarts Crystal Microbalance(QCM) online monitoring illustrates that the deposition thickness and the SWNT loading fraction in the nanocomposite can be controlled in a large range based on LbL sequential deposition process. When the cycle number of polymers increase from 0 to 5, the average film thickness increases from 6.31 to 111.59 nm, and the SWNT volume fraction decreases from 72.35 % to 14.78 %. In addition, the electric properties of the SWNT/polymer films under the influence of SWNT loading fraction and film thickness were investigated through current-voltage characterization. These results provide experimental and theoretical bases for potential applications of SWNT films in MEMS devices.