[1] [1] XIA G M, YANG B, WANG SH R. Digital self-oscillation driving technology for silicon micro machined gyroscopes ［J］. Opt. Precision Eng., 2011,19(3): 635-640. (in Chinese)

[2] [2] LU H X, WANG SH R, ZHOU B L. Robustness analysis of a type of feedback controller and design of closed-loop sensing circuit of micro-machined gyroscope ［J］. Journal of Southeast University, 2011, 41(3): 526-532. (in Chinese)

[3] [3] CUI J, GUO Z, ZHAO Q, et al.. Force rebalance controller synthesis for a micromachined vibratory gyroscope based on sensitivity margin specifications ［J］. Journal of Microelectromechanical Systems, 2011,20(6): 1382-1394.

[4] [4] SUNG S, SUNG W-T, LEE J G,et al.. Vibratory gyroscope controller design via modified automatic gain control configuration ［C］. International Conference on Control, Automation and Systems, 2007 ICCAS'07, 2007: 1361-1367.

[5] [5] NORTHEMANN T, MAURER M, ROMBACH S, et al.. A digital interface for gyroscopes controlling the primary and secondary mode using bandpass sigma–delta modulation ［J］. Sensors and Actuators A: Physical, 2010, 162(2): 388-393.

[6] [6] CHINWUBA D E, BEMHARD E B. A mode-matching ∑Δ closed-loop vibratory gyroscope readout interface with a 0.004o/s/√Hz nosie floor over a 50 Hz Band ［J］. IEEE Journal of Solid-State Circuit, 2008, 43(2): 3039-3048.

[7] [7] RAMAN J, CRETU E, ROMBOUTS P, et al.. A closed-loop digitally controlled MEMS gryoscope with unconstrained sigma-delta force-feedback ［J］. IEEE Sensors Journal, 2009, 9(3): 297-305.

[8] [8] NORTHEMANN T, MAURER M, ROMBACH S, et al.. A digital interface for gyroscopes controlling the primary and secondary mode using bandpass sigma-delta modulation ［J］. Sensors and Actuators A: Physical, 2010,162(2): 388-393.

[9] [9] SHI Q, QIU A P, SU Y, et al..Mechanical coupling error of silicon microgyroscope ［J］．Opt. Precision Eng., 2008, 16(5): 894-898. (in Chinese)

[10] [10] LI J, DONG J X, LIU Y F, et al..Effects of preload voltage on performance of force-rebalance micro silicon accelerometer ［J］．Journal of Transducer Technology, 2008, 23(8): 35-40. (in Chinese)

[11] [11] WANG M L, ZHANG W P, HUANG X G, et al.. Differential capacitance detection circuit design based on the sigma-delta technology ［J］. Electrical Measurement & Instrumentation, 2007,44(11): 59-61. (in Chinese)

[12] [12] RICHARD S. Delta Sigma Toolbox［OL］. File Exchange, 2011. HHUUhttp: //www.mathworks.cn/matlabcentral/fileexchange/19-delta-sigma-toolbox.