[4] [4] Ulich B L. Overview of acquisition, tracking, and pointing system technologies[J]. Proc SPIE, 1988, 887: 40–63.

[5] [5] Wang C C, Hu L F, Wang Y K, et al. Time delay compensation method for tip-tilt control in adaptive optics system[J]. Appl Opt, 2015, 54(11): 3383–3388.

[6] [6] He Q N, Luo Y, Mao Y, et al. An acceleration feed-forward control method based on fusion of model output and sensor data[J]. Sens Actuators A: Phys, 2018, 284: 186–193.

[9] [9] Ma J S, Kang M S, Kwon W H, et al. Time delay compensation of the image sensor in electro-optical tracking system[J]. J Sens Sci Technol, 1998, 7(1): 23–30.

[10] [10] Cao Z, Chen J, Deng C, et al. Improved smith predictor control for fast steering mirror system[J]. IOP Conf Ser: Earth Environ Sci, 2017, 69(1): 012085.

[11] [11] Tang T, Deng C, Yang T, et al. Error-based observer of a charge couple device tracking loop for fast steering mirror[J]. Sensors, 2017, 7(3): 479.

[14] [14] Tang T, Tian J, Zhong D J, et al. Combining charge couple devices and rate sensors for the feedforward control system of a charge coupled device tracking loop[J]. Sensors, 2016, 16(7): 968.

[15] [15] Sani M H, Saghaei H, Mehranpour M A, et al. A novel all-optical sensor design based on a tunable resonant nanocavity in photonic crystal microstructure applicable in MEMS accelerometers[J]. Photonic Sens, 2021, 11(4): 457–471.

[16] [16] Bernstein J. An overview of MEMS inertial sensing technology[J]. Sensors, 2003, 20(2): 14–21.

[17] [17] Liu Y, Zhao Y L, Wang W Z, et al. A high-performance multi-beam microaccelerometer for vibration monitoring in intelligent manufacturing equipment[J]. Sens Actuators A: Phys, 2013, 189: 8–16.

[18] [18] Liu H B, Zhou T. Robust state estimation for uncertain linear systems with random parametric uncertainties[J]. Sci China Inf Sci, 2017, 60(1): 012202.

[19] [19] Rubinstein R Y, Kroese D P. Simulation and the Monte Carlo Method[M]. 2nd ed. New York: John Wiley & Sons, 2008.

[20] [20] Tian J, Yang W S, Peng Z M, et al. Inertial sensor-based multiloop control of fast steering mirror for line of sight stabilization[J]. Opt Eng, 2016, 55(11): 1116022.