[1] Kallman T, Evans D A, Marshall H. A census of X-ray gas in NGC 1068: Results from 450 ks of Chandra high energy transmission grating observations[J]. Astrophys J, 780, 121(2014).

[2] Wang Q D, Nowak M A, Markoff S B. Dissecting X-ray emitting gas around the center of our galaxy[J]. Science, 341, 981-983(2013).

[3] Tzanavaris P, Yaqoob T. New constraints on the geometry and kinematics of matter surrounding the accretion flow in X-ray binaries from Chandra high-energy transmission grating X-ray spectroscopy[J]. Astrophys J, 855, 25(2018).

[4] Shpilman Z, Hurvitz G, Danon L. A combined sinusoidal transmission grating spectrometer and X-ray diode array diagnostics for time-resolved spectral measurements in laser plasma experiments[J]. Rev Sci Instrum, 90, 013501(2019).

[5] Kühne M, Müller P. Higher order contributions in the synchrotron radiation spectrum of a toroidal grating monochromator determined by the use of a transmission grating[J]. Rev Sci Instrum, 60, 2101(1989).

[6] [6] Sokolov A A, Eggenstein F, Erko A, et al. An XUV optics beamline at BESSY II [C]Proc of SPIE. 2014: 92060J.

[7] Suits A G, Heimann P, Yang Xueming. A differentially pumped harmonic filter on the chemical dynamics beamline at Advanced Light Source[J]. Rev Sci Instrum, 66, 4841(1995).

[8] Heimann P A, Koike M, Hsu C W. Performance of the vacuum ultraviolet high-resolution and high-flux beamline for chemical dynamics studies at the Advanced Light Source[J]. Rev Sci Instrum, 68, 1945(1997).

[9] [9] Zhou Hongjun, Wang Guanjun, Zheng Jinjin, et al. Higher der harmonics contribution suppression in metrology beamline [C]Proc of SPIE. 2010: 75445

[10] Cao Leifeng, Förster E, Fuhrmann A. Single order X-ray diffraction with binary sinusoidal transmission grating[J]. Appl Phys Lett, 90, 053501(2007).

[11] Zang Huaping, Wang Chuanke, Cao Leifeng. Elimination of higher-order diffraction using zigzag transmission grating in soft X-ray region[J]. Appl Phys Lett, 100, 111904(2012).

[12] Liu Yuwei, Zhu Xiaoli, Gao Yulin. Quasi suppression of higher-order diffractions with inclined rectangular apertures gratings[J]. Sci Rep, 5, 16502(2015).

[13] Fan Quanping, Liu Yuwei, Wang Chuanke. Single-order diffraction grating designed by trapezoidal transmission function[J]. Opt Letts, 40, 2657(2015).

[14] Liu Ziwei, Shi Lina, Pu Tanchao. Two-dimensional gratings of hexagonal holes for high order diffraction suppression[J]. Opt Express, 25, 1339(2017).

[15] Kuang Longyu, Wang Chuanke, Wang Zhebin. Quantum-dot-array diffraction grating with single order diffraction property for soft X-ray region[J]. Rev Sci Instrum, 81, 073508(2010).

[16] Li Hailiang, Shi Lina, Wei Lai. Higher-order diffraction suppression of free-standing quasiperiodic nanohole arrays in the X-ray region[J]. Appl Phys Lett, 110, 041104(2017).

[17] Gao Yulin, Zhou Weimin, Wei Lai. Diagnosis of the soft X-ray spectrum emitted by laser-plasmas using a spectroscopic photon sieve[J]. Laser & Particle Beams, 30, 313-317(2012).

[18] Chen Yong, Wei Lai, Qian Feng. Higher order harmonics suppression in extreme ultraviolet and soft X-ray[J]. Chin Phys B, 27, 024101(2018).

[19] Wei Lai, Qian Feng, Yang Zuhua. Diffraction properties of quasi-random pinhole arrays: suppression of higher orders and background fluctuations[J]. J Mod Opt, 64, 2420(2017).

[20] Wei Lai, Chen Yong, Wang Shaoyi. Suppression of higher diffraction orders in the extreme ultraviolet range by a reflective quasi-random square nano-pillar array[J]. Rev Sci Instrum, 89, 093110(2018).

[21] [21] Hua Y L, Gao N, Xie C Q. Fabrication of ultralarge single der diffraction grating f soft Xray monochromat [C]IEEE Symposium on Design, Test, Integration Packaging of MEMS MOEMS. 2016: 1–4.