Fig. 1. Schematic diagram of laser feedback interferometer for two-dimensional dynamic displacement measurement based on frequency division multiplexing technique

Fig. 2. Schematic diagram of two-dimensional displacementof grating

Fig. 3. Experimental setup

Fig. 4. Experimental results of two-dimensional nano-displacement platform moving in X and Z directions. (a) Laser feedback interference signal; (b) Fourier spectrum of interference signal; (c) reconstruction result of two-dimensional dynamic displacement

Fig. 5. Displacement reconstruction results. (a1)(b1) Relationship between grating displacement in X direction and motion time; (a2)(b2) relationship between grating displacement in Z direction and motion time; (a3)(b3) Lissajous images restructed by displacements in X and Z directions

Fig. 6. Schematic diagram of angular deviation between grating plane and moving axis of nano-displacement platform

Fig. 7. Schematic diagram of system measurement range

Fig. 8. System stability test