Acta Optica Sinica, Volume. 42, Issue 10, 1012003(2022)
Laser Feedback Interferometer for Two-Dimensional Dynamic Displacement Measurement Based on Frequency Division Multiplexing Technique
A laser feedback interferometer for two-dimensional dynamic displacement measurement based on frequency division multiplexing technique is proposed. The output beam of laser is divided into two channels, which incident to the grating at ±1st-order auto-collimation diffraction angles respectively, and then return to the cavity along the original optical path to generate laser feedback interference. Eelectro-optic crystals are placed at ±1st-order diffractive optical paths to produce high frequency phase modulation. Two-dimensional dynamic displacement measurement can be realized by using frequency division multiplexing technique. The experimental results show that the proposed method can reconstruct the two-dimensional dynamic displacement of the object, and the displacement resolution can reach the order of 10 nm. By introducing a diffraction grating into the laser feedback interferometer, the proposed scheme not only improves the stability and anti-environmental interference ability of laser feedback interference measurement system, but also provides a new idea for multi-dimensional micro-displacement measurement using single light source.
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Qin Yang, Lei Chen, Dongmei Guo, Jie Wang, Wei Xia, Hui Hao, Ming Wang. Laser Feedback Interferometer for Two-Dimensional Dynamic Displacement Measurement Based on Frequency Division Multiplexing Technique[J]. Acta Optica Sinica, 2022, 42(10): 1012003
Category: Instrumentation, Measurement and Metrology
Received: Oct. 18, 2021
Accepted: Dec. 20, 2021
Published Online: May. 10, 2022
The Author Email: Guo Dongmei (guodongmei@njnu.edu.cn)