Piezoelectrics & Acoustooptics, Volume. 42, Issue 1, 113(2020)
Research on Control of Micro-nano Manipulation Imaging System Based on Differential Feedforward ADRC
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WU Wenpeng, ZHAO Qingxu, WANG Yifan, HU Zhen. Research on Control of Micro-nano Manipulation Imaging System Based on Differential Feedforward ADRC[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 113
Paper Information
Received: Oct. 30, 2019
Accepted: --
Published Online: Apr. 21, 2022
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