Micro-nano manipulation imaging system is an important tool to explore the micro world. The traditional PI controller has problems such as difficult parameter adjustment, low control accuracy and weak anti-interference ability. In this paper, based on adrc, a differential feed-forward link is added to solve the tracking error of adrc in high frequency periodic signals. Firstly, the mathematical model of micro-nano manipulation system structure is given, and an adrc is designed based on the model information. The differential feedforward is given by using the known information. Finally, the simulation is carried out in Matlab. The results show that, compared with the linear adrc and PI control, the adrc with differential feedforward has smaller tracking error, and the system’s anti-interference ability is improved significantly.