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Ultrafast Science, Volume. 2, Issue 1, 0001(2022)

Two-Beam Ultrafast Laser Scribing of Graphene Patterns with 90-nm Subdiffraction Feature Size

Xi Chen1...2,* and Min Gu12,* |Show fewer author(s)
Author Affiliations
  • 1Institute of Photonic Chips, University of Shanghai for Science and Technology, Shanghai 200093, China.
  • 2Centre for Artificial-Intelligence Nanophotonics, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China.
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    Xi Chen, Min Gu. Two-Beam Ultrafast Laser Scribing of Graphene Patterns with 90-nm Subdiffraction Feature Size[J]. Ultrafast Science, 2022, 2(1): 0001

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    Paper Information

    Category: Research Articles

    Received: May. 19, 2022

    Accepted: Oct. 19, 2022

    Published Online: Sep. 28, 2023

    The Author Email: Chen Xi (xichen@usst.edu.cn), Gu Min (gumin@usst.edu.cn)

    DOI:10.34133/ultrafastscience.0001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology