Infrared and Laser Engineering, Volume. 51, Issue 5, 20210599(2022)

Effects of isolation trough on cleavage of InSb chip in InSb detector

Xiaohan Tian1... Jiangfeng Zhang1, Xiaoling Zhang2 and Qingduan Meng1 |Show fewer author(s)
Author Affiliations
  • 1School of Electrical Engineering, Henan University of Science and Technology, Luoyang 471023, China
  • 2School of Software, Henan University of Science and Technology, Luoyang 471023, China
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    Figures & Tables(6)
    Two-dimensional model of InSb IRFPAs (local model). (a) Without isolation trough; (b) With V-shaped isolation trough added; (c) Bottom of V-shaped isolation trough is connected with preset crack; (d) Preset crack is away from the bottom of V-shaped isolation trough with a distance of 1 μm
    Coefficients of thermal expansion (CTE) depending on temperature for InSb, underfill and Silicon-ROIC
    (a) In-plane normal stress distribution of InSb front surface; (b) In-plane normal stress distribution in region of isolation trough existed
    Energy release rate of the preset crack connected with the bottom of V-shaped isolation trough
    Comparison of energy release rate between the preset crack connected directly with the bottom of V-shaped isolation trough and the preset crack is away from the bottom of V-shaped isolation trough with a distance of 1 μm
    • Table 1. Mechanical parameters and specific sizes of InSb IRFPAs

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      Table 1. Mechanical parameters and specific sizes of InSb IRFPAs

      MaterialsElastic modulus E/GPa Poison's ratiovTemperature T/K Length/mm×height/mm
      InSb409 (In-plane)0.3577-30010×0.01
      123 (Z-direction)
      Underfill0.0002/α0.3077-30010×0.01
      Silicon-ROIC1630.2877-30012.8×0.3
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    Xiaohan Tian, Jiangfeng Zhang, Xiaoling Zhang, Qingduan Meng. Effects of isolation trough on cleavage of InSb chip in InSb detector[J]. Infrared and Laser Engineering, 2022, 51(5): 20210599

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    Paper Information

    Category: Optical devices

    Received: Aug. 24, 2021

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.3788/IRLA20210599

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