Fig. 1. Distribution diagram of Gaussian beam amplitude

Fig. 2. Superposition diagram of Gaussian beam

Fig. 3. Scanning schematic diagram of fast scanning galvanometer

Fig. 4. x-sided optical path diagram

Fig. 5. y-sided optical path diagram

Fig. 6. Geometric structure diagram of galvanometer

Fig. 7. Structure diagram of x galvanometer

Fig. 8. Structure diagram of y galvanometer

Fig. 9. Schematic diagram of maximum deflection angle of x and y galvanometer

Fig. 10. Relationship between each parameter and deflection angle of x galvanometer

Fig. 11. Physical drawing of solar irradiance simulation light source

Fig. 12. Laser stability within 1 hour

Fig. 13. Interface of software

Fig. 14. Scanning pattern in shape of concentric circle

Fig. 15. Scanning pattern in shape of helix

Fig. 16. Scanning pattern in shape of serpentine

Fig. 17. Nonuniformity assessment methods

Fig. 18. Field comparison for calibration device