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Optics and Precision Engineering, Volume. 15, Issue 12, 1926(2007)

Correction of pattern transfer errors for SU-8 UV deep lithography

[in Chinese]1... [in Chinese]1, [in Chinese]2, [in Chinese]2, [in Chinese]2, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Correction of pattern transfer errors for SU-8 UV deep lithography[J]. Optics and Precision Engineering, 2007, 15(12): 1926

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    Received: Aug. 20, 2007

    Accepted: --

    Published Online: Jul. 8, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology