Journal of Infrared and Millimeter Waves, Volume. 44, Issue 1, 122(2025)

Design and validation of RLC equivalent circuit model based on long-wave infrared metamaterial absorber

Ji-Cong ZHAO1...2, Yan-Meng DANG1, Hai-Yang HOU1, Ye-Fan LIN1, Hai-Yan SUN1,* and Kun ZHANG2,** |Show fewer author(s)
Author Affiliations
  • 1School of Microelectronics and School of Integrated Circuits,Nantong University,Nantong 226019,China
  • 2State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
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    Figures & Tables(7)
    MIM-MAs infrastructure and related performance:(a) Schematic of the proposed structure of MIM-MAs;(b) Optical parameters of AlN and Mo;(c) Design the schematic diagram of the absorption,reflectivity and transmittance curves of the MAs structure
    Mapping of electric and magnetic field distribution at MAs absorption peak:(a) x-y plane and(b) x-z plane electric field distribution;(c) x-y plane and(d) x-z plane magnetic field distribution;(e) x-y plane and(f) x-z plane power density distribution
    The proposed equivalent circuit model structure:(a) Schematic diagram of the RLC equivalent circuit model for MIM-MAs;(b) Real and imaginary parts of the relative impedance of the equivalent circuit model
    Comparison of RLC circuit model prediction results and FDTD simulation results: At p=3.6 µm,(a) resonant wavelength and(c) FWHM for different values of w are as follows; At w=2.6 µm,(b) resonant wavelength and(d) FWHM for different values of p are as follows
    Preparation by MIM-MAs process:(a) Process steps to fabrication MAs;(b) SEM image of the fabricated MAs;(c) Tested MAs absorption response(orange points) versus the absorption response predicted by the RLC equivalent circuit model(blue points)
    • Table 1. The structural parameters of the designed MAs

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      Table 1. The structural parameters of the designed MAs

      Periodp[µm]3.6
      Characteristic length(width)w[µm]2.6
      Thickness of top metallic patterntAu[nm]50
      Thickness of dielectric spacertAlN[nm]200
      Thickness of bottom metallic patterntMo[nm]100
    • Table 2. Physical parameters of the RLC circuit model

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      Table 2. Physical parameters of the RLC circuit model

      w(μm)λFDTD(μm)λRLC(μm)Cm(F)Cg(F)Lm(H)Le(H)Le(H)Rc(Ω)Rg(Ω)
      2.28.978.911.25×10-154.62×10-171.26×10-136.43×10-131.22×10-120.451.23
      2.39.169.171.48×10-154.74×10-171.26×10-136.65×10-131.18×10-120.431.20
      2.49.329.271.84×10-154.84×10-171.26×10-136.98×10-131.16×10-120.341.13
      2.59.469.432.04×10-155.02×10-171.26×10-137.12×10-131.12×10-120.381.21
      2.69.639.612.21×10-155.19×10-171.26×10-137.38×10-131.08×10-120.411.26
      2.79.759.762.33×10-155.52×10-171.26×10-137.54×10-131.01×10-120.411.13
      2.89.879.892.48×10-155.71×10-171.26×10-137.63×10-130.96×10-120.401.12
      2.99.9910.042.73×10-156.11×10-171.26×10-137.92×10-130.84×10-120.391.10
      3.010.0910.172.88×10-156.36×10-171.26×10-138.18×10-130.78×10-120.391.09
      3.110.2010.293.03×10-156.77×10-171.26×10-138.67×10-130.69×10-120.401.08
      3.210.3110.373.36×10-156.69×10-171.26×10-138.96×10-130.65×10-120.381.07
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    Ji-Cong ZHAO, Yan-Meng DANG, Hai-Yang HOU, Ye-Fan LIN, Hai-Yan SUN, Kun ZHANG. Design and validation of RLC equivalent circuit model based on long-wave infrared metamaterial absorber[J]. Journal of Infrared and Millimeter Waves, 2025, 44(1): 122

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    Paper Information

    Category: Interdisciplinary Research on Infrared Science

    Received: May. 4, 2024

    Accepted: --

    Published Online: Mar. 5, 2025

    The Author Email: SUN Hai-Yan (sun.yan@ntu.edu.cn), ZHANG Kun (zhangkun@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2025.01.016

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