Acta Photonica Sinica, Volume. 44, Issue 6, 604002(2015)

InGaAs-MSM Photodetector with Low Dark Current

YAN Xin1...2,*, WANG Tao1, YIN Fei1, NI Hai-qiao3, NIU Zhi-chuan3, XIN Li-wei1 and TIAN Jin-shou1 |Show fewer author(s)
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  • 1[in Chinese]
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    References(13)

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    [4] [4] FANG X,GU Y,CHEN X Y,et al.InP-based InxGa1-xAs metamorphic buffers with different mismatched grading rates [J].Journal of Semiconductors,2013,34(7):073005-1-4.

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    [7] [7] WANG Hai-xiao,ZHENG Xin-he,WEN Yu,et al.The design of 1 eV band-gap of GaNAs/InGaAs short-period super-lattice solar cell [J].Science China Physics,Mechanics & Astronomy,2013,43(8):930-935.

    [11] [11] CHEN Y P,YUKI I,OSAMU I,et al.Waveguide InGaAs photodetector with Schottky barrier enhancement layer on Ⅲ-Ⅴ CMOS photonics [C].Indium Phosphide and Related Materials,26th International Conference on,2014:1-2.

    [12] [12] ZHANG Yong-gang,SHAN Hong-kun,ZHOU Ping,et al.InGaAs MSM photodetectors with InP:Fe barrier enhancement layer[J].Acta Photonica Sinica,1995,24(3):223-225.

    [13] [13] JOOST B,GUNTHER R,DRIES V T.Photo-spectrometer based on the integration of InP/InGaAs photodetectors onto a Silicon-on-insulator etched diffraction grating[C].6th UGent-FirW PhD symposium,2005,24:1-2.

    [15] [15] TAN Hua,SHI Chang-xin,WANG Sen-zhang.Theoretical calculation of the dark current in MSM-PD with a barrier-enhancement layer [J].Research & Progress of Solid State Electronics,1998,18:176-180.

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    YAN Xin, WANG Tao, YIN Fei, NI Hai-qiao, NIU Zhi-chuan, XIN Li-wei, TIAN Jin-shou. InGaAs-MSM Photodetector with Low Dark Current[J]. Acta Photonica Sinica, 2015, 44(6): 604002

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    Paper Information

    Received: Jan. 20, 2015

    Accepted: --

    Published Online: Jun. 25, 2015

    The Author Email: Xin YAN (yanxin@opt.ac.cn)

    DOI:10.3788/gzxb20154406.0604002

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