Acta Optica Sinica, Volume. 39, Issue 12, 1222002(2019)
Lithographic Tool-Matching Method Based on Differential Evolution Algorithm
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Yanjie Mao, Sikun Li, Xiangzhao Wang, Yayi Wei. Lithographic Tool-Matching Method Based on Differential Evolution Algorithm[J]. Acta Optica Sinica, 2019, 39(12): 1222002
Category: Optical Design and Fabrication
Received: Jun. 26, 2019
Accepted: Aug. 13, 2019
Published Online: Dec. 6, 2019
The Author Email: Li Sikun (lisikun@siom.ac.cn), Wang Xiangzhao (wxz26267@siom.ac.cn)