Optics and Precision Engineering, Volume. 23, Issue 11, 3114(2015)
Characterization and verification of MEMS resonator nonlinearity
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WANG Yu-zhao, YU Cai-jia, TIAN Rui, TENG Lin. Characterization and verification of MEMS resonator nonlinearity[J]. Optics and Precision Engineering, 2015, 23(11): 3114
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Received: Feb. 12, 2015
Accepted: --
Published Online: Jan. 25, 2016
The Author Email: Yu-zhao WANG (tinghx@163.com)