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Optics and Precision Engineering, Volume. 23, Issue 11, 3114(2015)

Characterization and verification of MEMS resonator nonlinearity

WANG Yu-zhao1...2,*, YU Cai-jia1, TIAN Rui1 and TENG Lin1 |Show fewer author(s)
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    WANG Yu-zhao, YU Cai-jia, TIAN Rui, TENG Lin. Characterization and verification of MEMS resonator nonlinearity[J]. Optics and Precision Engineering, 2015, 23(11): 3114

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    Received: Feb. 12, 2015

    Accepted: --

    Published Online: Jan. 25, 2016

    The Author Email: Yu-zhao WANG (tinghx@163.com)

    DOI:10.3788/ope.20152311.3114

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology