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Chinese Optics Letters, Volume. 7, Issue 12, 1109(2009)

Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry

Invited Paper
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  • G. Pedrini1*, J. Gaspar2, O. Paul2, and W. Osten1
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    The article is cited by 8 article(s) from Web of Science.
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    Invited Paper. Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry[J]. Chinese Optics Letters, 2009, 7(12): 1109

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    Paper Information

    Received: Sep. 7, 2009

    Accepted: --

    Published Online: Dec. 18, 2009

    The Author Email:

    DOI:10.3788/COL20090712.1109

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology