Acta Photonica Sinica, Volume. 43, Issue 4, 426001(2014)

Multi-step Phase-shifting Algorithm Based on Extended Averaging Technique and its Error Suppression Characteristics Comparison

GAO Fen1...2,3,*, JIANG Zhuang-de1,2, LI Bing1,2 and TIAN Ai-ling3 |Show fewer author(s)
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    References(15)

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    [3] [3] GARY E S, DONALD W P, MICHAEL A J, et al. 100-picometer interferometry for EUVL[C].SPIE, 2002, 4688: 317-328.

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    [7] [7] WEI Hao-ming, XING Ting-wen, LI Yun, et al. Measurement errors in 632.8 nm high precision phase-shifting Fizeau interferometer[J].Laser & Optoelectronics Progress, 2010, 47(4): 041202.

    [9] [9] WANG Sheng-wang, CHENG Lei, CHENG Jin-bang, et al. Phase-shifting error analysis of Fizeau spherical interferometer[J]. Acta Photonica Sinica,1996, 25(10): 883-888.

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    GAO Fen, JIANG Zhuang-de, LI Bing, TIAN Ai-ling. Multi-step Phase-shifting Algorithm Based on Extended Averaging Technique and its Error Suppression Characteristics Comparison[J]. Acta Photonica Sinica, 2014, 43(4): 426001

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    Paper Information

    Received: Aug. 14, 2013

    Accepted: --

    Published Online: May. 4, 2014

    The Author Email: Fen GAO (gaofen8128@163.com)

    DOI:10.3788/gzxb20144304.0426001

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