Spectroscopy and Spectral Analysis, Volume. 37, Issue 6, 1946(2017)

Movable GaN Membrane Micro-Grating on Patterned SOI Substrate Deposited with Molecular Beam Epitaxy

L Fan-min1、*, LI Pei2, WANG Yong-jin3, HU Fang-ren1,3, and ZHU Wen-zhen1
Author Affiliations
  • 1[in Chinese]
  • 2Department of Microsystems Engineering—IMTEK, University of Freiburg, 79110 Freiburg, Germany
  • 3[in Chinese]
  • show less
    References(12)

    [1] [1] Chen Jr-Tai, James W Pomeroy, Niklas Rorsman, et al. Journal of Crystal Growth, 2015, 428: 54.

    [2] [2] Shieh Bing-Cheng, Jhang Yuan-Chang, Huang Kun-Pin, et al. Applied Physics Express, 8(8): 082101.

    [3] [3] Wang Yongjin, Chen Jiajia, Shi Zheng, et al. Applied Physics Express, 2014, 7: 052201.

    [4] [4] Wang Yongjin, Shi Zheng, Li Xin, et al. Optics Express, 2014, 22(1): 667.

    [5] [5] Yang Z, Wang R N, Jia S, et al. Applied Physics Letters, 2006, 88: 041913.

    [6] [6] Wang Qiang, Ji Ziwu, Xiao Hongdi, et al. Chinese Physics Letters, 2014, 31(8): 08813.

    [7] [7] Wang Yongjin, Hu Fangren, Hane Kazuhiro. Semiconductor Science Technology, 2011, 26: 045015.

    [8] [8] Wang Yongjin, Hu Fangren, Hane Kazuhiro. Nanoscale Research Letters, 2011, 6: 117.

    [9] [9] Li P, Sasaki T, Pan L F, et al. Optics Express, 2012, 20(1): 627.

    [10] [10] Zhang Jing, Tansu Nelson. Journal of Applied Physics, 2011, 110(11).

    [11] [11] Liu Lei, Wang Lei, Li Ding, et al. Journal of Applied Physics, 2011, 109: 073106.

    [12] [12] Wang Q, Bai J, Gong Y P, et al. Journal of Physics D: Applied Physics, 2011, 44: 395102.

    Tools

    Get Citation

    Copy Citation Text

    L Fan-min, LI Pei, WANG Yong-jin, HU Fang-ren, ZHU Wen-zhen. Movable GaN Membrane Micro-Grating on Patterned SOI Substrate Deposited with Molecular Beam Epitaxy[J]. Spectroscopy and Spectral Analysis, 2017, 37(6): 1946

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Nov. 26, 2015

    Accepted: --

    Published Online: Jul. 10, 2017

    The Author Email: Fan-min L (lfm15951900071@163.com)

    DOI:103964/jissn1000-0593(2017)06-1946-05

    Topics