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Optics and Precision Engineering, Volume. 18, Issue 5, 1204(2010)

Integrated uniaxial tensile test system for measuring mechanical properties of MEMS materials

WANG Hong*... TANG Jun, LIU Rui, CHEN Hui and DING Gui-fu |Show fewer author(s)
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    WANG Hong, TANG Jun, LIU Rui, CHEN Hui, DING Gui-fu. Integrated uniaxial tensile test system for measuring mechanical properties of MEMS materials[J]. Optics and Precision Engineering, 2010, 18(5): 1204

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    Paper Information

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    Received: Jul. 15, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Hong WANG (wanghongsjtu@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology