Fig. 1. Schematic drawings of (a) MEMS-based winding-shaped cantilever metamaterial (WCM) and (b) the geometrical denotations of the WCM unit cell.

Fig. 2. Relationship of cantilever heights and the applied DC bias voltages. Inserted optical images illustrate the bending deformations of MEMS-based WCM device under different DC bias voltages.

Fig. 3. SEM images of MEMS-based WCM device. Top views of MEMS-based WCM (a) array and (b) unit cell. (c) Side view of MEMS-based WCM device. (d) Composition of WCM single-cantilever.

Fig. 4. (a) Simulated and (b) measured transmission spectra of MEMS-based WCM device without driving voltages at different incident polarization angles.

Fig. 5. (a)–(c) Simulated and (d)–(f) measured transmission spectra of MEMS-based WCM device at different driving voltages for polarization angles of (a), (d) θ=0°; (b), (e) θ=45°; and (c), (f) θ=90°, respectively.

Fig. 6. Optical switching performances of MEMS-based WCM device operating at different driving voltages and monitoring at (a) 0.33 THz and (b) 0.88 THz.

Fig. 7. (a) Schematic drawings of MEMS-based WCM device integrated with MPA. Absorption spectra of (b) SRR, (c) CR, and (d) MPA. Insert images are drawings of unit cells. The geometrical dimensions are defined as l=85  μm, w=15  μm, a=135  μm, g=5  μm, and P=155  μm.

Fig. 8. AE of programmable device for the polarization angle of (a) θ=0°, (b) θ=45°, and (c) θ=90°, respectively.

Fig. 9. Programmable device is functionalized as logic (a) OR and (b) AND gates. They are working at the frequency of 0.33 THz and 0.88 THz, respectively.

Fig. 10. SEM images of eSRR-WCM (a) unit cell and (b) array. (c) The measured transmission spectra of eSRR-WCM at (c) θ=0° and (d) θ=90° by driving different voltages.