Acta Optica Sinica, Volume. 18, Issue 4, 471(1998)
Fabrication of Intergrated GeSi/Si Superlattic PIN Photodetector with Waveguide
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Intergrated GeSi/Si Superlattic PIN Photodetector with Waveguide[J]. Acta Optica Sinica, 1998, 18(4): 471