Optics and Precision Engineering, Volume. 14, Issue 1, 94(2006)

Development of a 2-DOF micropositioning table

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    References(5)

    [1] [1] ZHANG D W,TIAN Y L,GAO Y S.Development of a 3-DOF micropositioning workpiece table[J].Chinese Journal of Mechanical Engineering,2004,17(1):46-50.

    [2] [2] KIM J D,NAM S R.A piezoelectricaly driven micropositioning system for the ductile mode grinding of grinding materials[J].Journal of Materials Processing Technology,1997,61(3):310-319.

    [3] [3] GAO Y S,ZHANG D W,YU C W.Dynamic modeling of a novel workpiece table for active surface grinding control[J].International Journal of Machine Tools and Manufacture,2001,41(4):609-624.

    [5] [5] CHANG S H,TSENG C K,CHIEN H C.An ultra-precision XYθz piezo-micropositioner part I:design and analysis[J].IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1999,46(4):897-905.

    [6] [6] CHANG S H,TSENG C K,CHIEN H C.An ultra-precision XYθz piezo-micropositioner part II:experiment and performance[J].IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1999,46(4):906-912.

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    [in Chinese], [in Chinese], [in Chinese]. Development of a 2-DOF micropositioning table[J]. Optics and Precision Engineering, 2006, 14(1): 94

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    Paper Information

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    Received: Sep. 21, 2005

    Accepted: --

    Published Online: Feb. 18, 2008

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