Development of a 2-DOF micropositioning table

Optics and Precision Engineering, Volume. 14, Issue 1, 94(2006)

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[in Chinese], [in Chinese], [in Chinese]. Development of a 2-DOF micropositioning table[J]. Optics and Precision Engineering, 2006, 14(1): 94

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Received: Sep. 21, 2005

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Published Online: Feb. 18, 2008

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