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Laser & Optoelectronics Progress, Volume. 58, Issue 19, 1912001(2021)

Correction of Eccentricity Error in Absolute Flat Surface Testing by Shift-Rotation Method

Fanfan Shen1、*, Ailing Tian1、**, Dasen Wang2, Bingcai Liu1, Xueliang Zhu1, and Hongjun Wang1
Author Affiliations
  • 1College of Optoelectronic Engineering, Xi'an Technology University, Xi'an , Shaanxi 710032, China
  • 2Inner Mongolia Institute of Metal Materials, Ningbo , Zhejiang 315103, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (9)
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    References (18)
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    Figures & Tables(9)
    Measurement process of shift-rotationn absolute measurement method

    Fig. 1. Measurement process of shift-rotationn absolute measurement method

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    Position relationship between tested mirror and reference mirror. (a) Initial position; (b) rotation 90°; (c) rotate 180°

    Fig. 2. Position relationship between tested mirror and reference mirror. (a) Initial position; (b) rotation 90°; (c) rotate 180°

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    Surface shape distribution of initial plane element. (a) A surface shape; (b) B surface shape

    Fig. 3. Surface shape distribution of initial plane element. (a) A surface shape; (b) B surface shape

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    Relationship between PV and RMS values of residual surface shape and different parameters. (a) Eccentricity error; (b) rotation angle

    Fig. 4. Relationship between PV and RMS values of residual surface shape and different parameters. (a) Eccentricity error; (b) rotation angle

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    Registration mode. (a) Benchmark image; (b) image to be registered; (c) registration route

    Fig. 5. Registration mode. (a) Benchmark image; (b) image to be registered; (c) registration route

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    Surface shape distribution before registration. (a) T0'̑ surface shape; (b) Tπ' surface shape; (c) contour line at cross section

    Fig. 6. Surface shape distribution before registration. (a) T0'̑ surface shape; (b) Tπ' surface shape; (c) contour line at cross section

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    Surface shape distribution after registration (a) T0'̑ surface shape; (b) Tπ' surface shape; (c) contour line at cross section

    Fig. 7. Surface shape distribution after registration (a) T0'̑ surface shape; (b) Tπ' surface shape; (c) contour line at cross section

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    Initial surface distribution of different components. (a) C surface shape; (b) D surface shape; (c) E surface shape

    Fig. 8. Initial surface distribution of different components. (a) C surface shape; (b) D surface shape; (c) E surface shape

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    • Table 1. Error correction results of different surface shapes

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      Table 1. Error correction results of different surface shapes

      ComponentParameter /nmOriginal surface shapeOriginal residual surface shapeResidual surface shape after error correction
      CPV25.0047.7830.034
      RMS4.3900.5780.004
      DPV13.9043.4140.017
      RMS2.5720.3410.002
      EPV15.6217.8810.021
      RMS2.8610.4980.002
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    Fanfan Shen, Ailing Tian, Dasen Wang, Bingcai Liu, Xueliang Zhu, Hongjun Wang. Correction of Eccentricity Error in Absolute Flat Surface Testing by Shift-Rotation Method[J]. Laser & Optoelectronics Progress, 2021, 58(19): 1912001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 19, 2020

    Accepted: Feb. 4, 2021

    Published Online: Oct. 14, 2021

    The Author Email: Shen Fanfan (shenfansff@foxmail.com), Tian Ailing (ailintian@xatu.edu.cn)

    DOI:10.3788/LOP202158.1912001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology