Chinese Physics B, Volume. 29, Issue 9, (2020)

Band alignment of p-type oxide/ε-Ga2O3 heterojunctions investigated by x-ray photoelectron spectroscopy

Chang Rao1, Zeyuan Fei1, Weiqu Chen1, Zimin Chen1, Xing Lu1, Gang Wang1, Xinzhong Wang2, Jun Liang3, and Yanli Pei1,2、†
Author Affiliations
  • 1School of Electronics and Information Technology, State Key Laboratory of Optoelectronics Materials & Technologies, Sun Yat-Sen University, Guangzhou 50006, China
  • 2Department of Electronic Communication and Technology, Shenzhen Institute of Information Technology, Shenzhen 51817,China
  • 3School of Advance Materials, Peking University Shenzhen Graduated School, Shenzhen 518055, China
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    The ε-Ga2O3 p–n heterojunctions (HJ) have been demonstrated using typical p-type oxide semiconductors (NiO or SnO). The ε-Ga2O3 thin film was heteroepitaxial grown by metal organic chemical vapor deposition (MOCVD) with three-step growth method. The polycrystalline SnO and NiO thin films were deposited on the ε-Ga2O3 thin film by electron-beam evaporation and thermal oxidation, respectively. The valence band offsets (VBO) were determined by x-ray photoelectron spectroscopy (XPS) to be 2.17 eV at SnO/ε-Ga2O3 and 1.7 eV at NiO/ε-Ga2O3. Considering the bandgaps determined by ultraviolet-visible spectroscopy, the conduction band offsets (CBO) of 0.11 eV at SnO/ε-Ga2O3 and 0.44 eV at NiO/ε-Ga2O3 were obtained. The type-II band diagrams have been drawn for both p–n HJs. The results are useful to understand the electronic structures at the ε-Ga2O3 p–n HJ interface, and design optoelectronic devices based on ε-Ga2O3 with novel functionality and improved performance.

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    Chang Rao, Zeyuan Fei, Weiqu Chen, Zimin Chen, Xing Lu, Gang Wang, Xinzhong Wang, Jun Liang, Yanli Pei. Band alignment of p-type oxide/ε-Ga2O3 heterojunctions investigated by x-ray photoelectron spectroscopy[J]. Chinese Physics B, 2020, 29(9):

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    Paper Information

    Received: Mar. 25, 2020

    Accepted: --

    Published Online: Apr. 29, 2021

    The Author Email: Pei Yanli (peiyanli@mail.sysu.edu.cn)

    DOI:10.1088/1674-1056/ab9c0d

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