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Acta Optica Sinica, Volume. 39, Issue 11, 1124002(2019)

Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging

Ruxue Wei1,3, Yanwei Wang2,4, Liwen Jiang1, Xuqing Sun1, Hongyao Liu1, Chang Wang1,3, Xinchao Lu1、*, Weier Lu2,5,6、**, Yang Xia2,5,6, and Chengjun Huang1
Author Affiliations
  • 1Health Electronics Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2Microelectronic Instrument and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • 4Beijing Jiaotong University, Beijing 100044, China
  • 5Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication, Beijing 100029, China
  • 6Beijing Key Laboratory of Integrated Circuit Test Technology, Beijing 100088, China
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    Article index updated:May. 20, 2024

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    Ruxue Wei, Yanwei Wang, Liwen Jiang, Xuqing Sun, Hongyao Liu, Chang Wang, Xinchao Lu, Weier Lu, Yang Xia, Chengjun Huang. Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging[J]. Acta Optica Sinica, 2019, 39(11): 1124002

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    Paper Information

    Category: Optics at Surfaces

    Received: Jun. 24, 2019

    Accepted: Jul. 24, 2019

    Published Online: Nov. 6, 2019

    The Author Email: Lu Xinchao (luxinchao@ime.ac.cn), Lu Weier (luweier@ime.ac.cn)

    DOI:10.3788/AOS201939.1124002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology