[1] Yang Z Y, Albrow-Owen T, Cai W W et al. Miniaturization of optical spectrometers[J]. Science, 371, eabe0722(2021).

[2] Xuan Z Y, Zhi Y, Wang S W et al. Rapid and precise wavelength determination approach based on visually patterned integrated narrow bandpass filters[J]. IEEE Photonics Journal, 11, 4900307(2019).

[3] Zang K Y, Yao Y, Hu E T et al. A high-performance spectrometer with two spectral channels sharing the same BSI-CMOS detector[J]. Scientific Reports, 8, 12660(2018).

[4] Serruys P, Sima A, Livens S et al. Linear variable filters-A camera system requirement analysis for hyperspectral imaging sensors onboard small remotely piloted aircraft systems[C](2014).

[5] Wang Z, Yi S, Chen A et al. Single-shot on-chip spectral sensors based on photonic crystal slabs[J]. Nature Communications, 10, 1020(2019).

[6] Wang X Q, Wang L L, Fang J X. Research and application progresses of near-infrared spectral sensing internet of things[J]. Chinese Journal of Lasers, 48, 1210001(2021).

[7] Yu Z Q, Fei S G, Zhao S F et al. Design of optical thin-film filters for multispectral palmprint image acquisition systems[J]. Acta Optica Sinica, 41, 2331001(2021).

[8] Ayerden N P, de Graaf G, Wolffenbuttel R F. Compact gas cell integrated with a linear variable optical filter[J]. Optics Express, 24, 2981-3002(2016).

[9] Wan Y H, Carlson J A, Kesler B A et al. Compact characterization of liquid absorption and emission spectra using linear variable filters integrated with a CMOS imaging camera[J]. Scientific Reports, 6, 29117(2016).

[10] Zhu R, Tao C X, Yu Z et al. Design and fabrication of a 248-nm near-linearly graded transmittance optical film[J]. Chinese Journal of Lasers, 47, 0603001(2020).

[11] Ghaderi M, Ayerden N P, Emadi A et al. Design, fabrication and characterization of infrared LVOFs for measuring gas composition[J]. Journal of Micromechanics and Microengineering, 24, 084001(2014).

[12] Liu Q, Zhou J S, Nie Y F et al. Study of spectral property and measurement of linear variable filters[J]. Spectroscopy and Spectral Analysis, 35, 1142-1145(2015).

[13] Piegari A, Bulir J. Variable narrowband transmission filters with a wide rejection band for spectrometry[J]. Applied Optics, 45, 3768-3773(2006).

[14] Li W J, Wang C L, Zheng X B et al. Review of imaging spectrometer based on linear variable filter[J]. Infrared, 36, 1-7(2015).

[15] Pang T Q, Deng J X, Wang J Y et al. Effects of the annealing temperature on the crystallization and refraction index of the ZnO thin film[J]. Micronanoelectronic Technology, 52, 93-97(2015).

[16] Zhang Z L, Su J H. Simulation and reconstruction of 3D microscopic morphology of damaged optical film surface[J]. Acta Optica Sinica, 41, 0212002(2021).

[17] Luo Q H, Lou Y Z, Zhao Z Y et al. Effect of annealing on microstructure and mechanical properties of AlTiN multilayer coatings[J]. Acta Physica Sinica, 60, 066201(2011).

[18] Zhang S D, Bin W, Xu B B et al. Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array[J]. Nanoscale Research Letters, 14, 348(2019).

[19] Fan B, Li G Z, Cheng X B et al. Production and measurement of linear variable filter[J]. Optical Instruments, 28, 95-103(2006).

[20] Kiesel P, Schmidt O, Mohta S et al. Compact, low-cost, and high-resolution interrogation unit for optical sensors[J]. Applied Physics Letters, 89, 201113(2006).

[21] Wang X Z, Wang Z F, Bu Y K et al. Power-ratio tunable dual-wavelength laser using linearly variable Fabry-Perot filter as output coupler[J]. Applied Optics, 55, 879-883(2016).

[22] Yu X Y, Lu Q P, Gao H Z et al. Development of a handheld spectrometer based on a linear variable filter and a complementary metal-oxide-semiconductor detector for measuring the internal quality of fruit[J]. Journal of Near Infrared Spectroscopy, 24, 69-76(2016).

[23] Emadi A, Wu H, Grabarnik S et al. Fabrication and characterization of IC-compatible linear variable optical filters with application in a micro-spectrometer[J]. Sensors and Actuators A: Physical, 162, 400-405(2010).

[24] Liu L J, Khan H A, Li J J et al. A strain-tunable nanoimprint lithography for linear variable photonic crystal filters[J]. Nanotechnology, 27, 295301(2016).

[25] Tang H L, Gao J S, Zhang J et al. Preparation and spectrum characterization of a high quality linear variable filter[J]. Coatings, 8, 308(2018).

[26] Wang S F, Yuan Y, Su L J et al. Measurement of the spectral characteristic parameters of linear variable filters[J]. Acta Photonica Sinica, 46, 1112002(2017).

[27] Ji P, Gao S, Park C S et al. Linear variable filter enabling an enhanced wavelength gradient based on shadow-mask sputtering[J]. Microwave and Optical Technology Letters, 59, 3142-3146(2017).