Optics and Precision Engineering, Volume. 19, Issue 11, 2565(2011)

Calculation of resolution for EUV telescope based on surface roughness of mirrors

YANG Lin1...2,*, ZHENG Xian-liang1,2 and CHEN Bo2 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(19)

    [1] [1] STOVER J C. Optical Scattering-measurement and Analysis[M]. SPIE Press,1995.

    [2] [2] HARVEY J E, KRYWONONS A, STOVER J C. Unified scatter model for rough surface at large incident and scattered angles[J]. SPIE, 2007, 6672: 66720C1-C8.

    [3] [3] MARTINEZ-GALARCE D S, BOERNER P, SOUFLI R, et al..The high-resolution lightweight telescope for the EUV (HiLiTE)[J]. SPIE, 2008,7011:70113k-1-12.

    [4] [4] MARTINEZ-GALARCE D S, WALKER A B C, GORE D B, et al.. High resolution imaging with multilayer telescope: resolution performance of the MSSTAⅡ telescopes[J].Opt. Precision Eng., 2000,39(4): 1063-1079.

    [5] [5] DEFISE J M, MOSES J D,CATURA R C. Calibration of EIT instrument for the SOHO mission[J].SPIE,1995,2517: 29-39.

    [6] [6] CHEN B, NI Q L, CAO J H, et al.. Development of a space soft X-ray and EUV normal incidence telescope[J]. Opt. Precision Eng., 1999,7(5):89-94.(in Chinese)

    [8] [8] GAO L. Study on the technique of alignment and imaging performance test of EUV solar telescope[D]. Beijing:Chinese Academy of Sciences, 2009:24-34.(in Chinese)

    [9] [9] THOMPSON P L, HARVEY J E. System engineering analysis of aplanatic Wolter typeⅠX-ray telescopes[J].Opt. Precision Eng.,2000,39:1677-1691.

    [10] [10] LCHURCH E,TAKACS P Z. Light scatteringfrom non-Gaussian surface[J]. SPIE, 1995,2541:91-107.

    [11] [11] NICODEMUS F E. Reflectance nomenclature and directional reflectance and emissivity[J]. Applied Optics, 1970,9:1474-1475.

    [12] [12] GULLIKSON E M. Scattering from normal incidence EUV optics[J]. SPIE, 1998,3331:72-80.

    [13] [13] CHURCH E L. Fractal surface finishparameters[J]. Applied Optics, 1988,27:1518-1526.

    [14] [14] HARVEY J E, CHOI N, KRYWONONS A. Calculation BRDFs from surface PSDs for moderately rough optical surface[J]. SPIE, 2010, 7426:7426011-7426019.

    [15] [15] DITTMAN M G. K-correlation power spectral density & surface scatter model[J]. SPIE, 2010, 6291:62910R1-R12.

    [16] [16] GANGADHARA S. How to model surface scattering via the K-correlation distribution[R]. http://www.Zemax.com/KB

    [17] [17] HARVERY J E, ZMEK W P, FTACLAS C. Imaging capabilities of normal-incidence X-ray telescope[J]. Opt. Precision Eng., 1990, 29: 603-608.

    [18] [18] WALKER B C, LINDBLOM J F, ONEAL R H, et al.. Multi-spectral solar telescope array[J]. Optical Engineering, 1990, 29: 581-591.

    [19] [19] PODGORSKI W A, CHEIMETS P N, BOERNER P. et al.. SDO-AIA mirror performance[J]. SPIE, 2009, 7438:74380F1-F13.

    CLP Journals

    [1] Wang Yi, Lu Qipeng, Gao Yunguo. Impact of Carbon Contamination Cleaning Technologies on Reflectivity of Extreme Ultraviolet Lithography Optics[J]. Chinese Journal of Lasers, 2017, 44(3): 303004

    [2] Liu Jian, Wang Shaozhi, Zhang Linghua, Wang Junlin. Computer Controlled Ultra-Smooth Polishing High Order Rotary Symmetrical Aspheric Lens[J]. Chinese Journal of Lasers, 2013, 40(8): 816001

    Tools

    Get Citation

    Copy Citation Text

    YANG Lin, ZHENG Xian-liang, CHEN Bo. Calculation of resolution for EUV telescope based on surface roughness of mirrors[J]. Optics and Precision Engineering, 2011, 19(11): 2565

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Sep. 13, 2010

    Accepted: --

    Published Online: Dec. 5, 2011

    The Author Email: Lin YANG (pieroyang@163.com)

    DOI:10.3788/ope.20111911.2565

    Topics