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Chinese Journal of Quantum Electronics, Volume. 31, Issue 1, 1(2014)

Recent advances in multilayer coatings for extreme ultraviolet lithography

Juan-juan QIN*... Wei-wei DONG, Shu ZHOU, Li-bing YOU and Xiao-dong FANG |Show fewer author(s)
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    QIN Juan-juan, DONG Wei-wei, ZHOU Shu, YOU Li-bing, FANG Xiao-dong. Recent advances in multilayer coatings for extreme ultraviolet lithography[J]. Chinese Journal of Quantum Electronics, 2014, 31(1): 1

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    Received: May. 29, 2013

    Accepted: --

    Published Online: Feb. 26, 2014

    The Author Email: Juan-juan QIN (tiancaijuanjuan@126.com)

    DOI:10.3969/j.issn.1007-5461. 2014.01.001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology