Chinese Journal of Quantum Electronics, Volume. 29, Issue 6, 764(2012)
Alignment technology using matched filter correlation in projection lithography
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
LEI Liang, LI Lang-lin, ZHOU Jin-yun, WANG Qu. Alignment technology using matched filter correlation in projection lithography[J]. Chinese Journal of Quantum Electronics, 2012, 29(6): 764
Paper Information
Category:
Received: Feb. 7, 2012
Accepted: --
Published Online: Nov. 29, 2012
The Author Email: Liang LEI (leiliang@gdut.edu.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20