Acta Optica Sinica, Volume. 17, Issue 4, 489(1997)
Optical Properties of SiNx Films Prepared by Microwave ECR-CVD
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical Properties of SiNx Films Prepared by Microwave ECR-CVD[J]. Acta Optica Sinica, 1997, 17(4): 489