Acta Optica Sinica, Volume. 17, Issue 4, 489(1997)
Optical Properties of SiNx Films Prepared by Microwave ECR-CVD
The optical properties of SiN x films prepared by microwave ECR CVD have been investigated.The wide transmission spectrum and high transmissivity of SiN x films are obtained. The effects of microwave power and substrate temperature on transmission spectra, refractive index, optical band gap are analysed.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical Properties of SiNx Films Prepared by Microwave ECR-CVD[J]. Acta Optica Sinica, 1997, 17(4): 489