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Infrared and Laser Engineering, Volume. 45, Issue 6, 622002(2016)

Design and manufacture of columned antireflective periodic microstructures on the surface of Si substrate

Dong Tingting1、*, Fu Yuegang1, Chen Chi2, Zhang Lei1, Ma Chenhao1, and Zhao Xuan1
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  • 2[in Chinese]
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    Dong Tingting, Fu Yuegang, Chen Chi, Zhang Lei, Ma Chenhao, Zhao Xuan. Design and manufacture of columned antireflective periodic microstructures on the surface of Si substrate[J]. Infrared and Laser Engineering, 2016, 45(6): 622002

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    Paper Information

    Category: 光通信与光传感

    Received: Oct. 11, 2015

    Accepted: Nov. 23, 2015

    Published Online: Jul. 26, 2016

    The Author Email: Tingting Dong (dong_tingting_good@126.com)

    DOI:10.3788/irla201645.0622002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology