Formaldehyde gas sensor based on TiO<sub>2</sub> thin membrane integrated with nano silicon structure

Xuan ZHENG; An-jie MING; Li YE; Feng-hua CHEN; Xi-long SUN; Wei-bing LIU; Chao-bo LI; Wen OU; Wei-bing WANG; Da-peng CHEN

doi:10.1007/s11801-016-5249-5

Optoelectronics Letters, Volume. 12, Issue 4, 308(2016)

Formaldehyde gas sensor based on TiO₂ thin membrane integrated with nano silicon structure

Xuan ZHENG1... An-jie MING2,*, Li YE3, Feng-hua CHEN3, Xi-long SUN1, Wei-bing LIU2, Chao-bo LI2, Wen OU2, Wei-bing WANG2 and Da-peng CHEN2 |Show fewer author(s)

Author Affiliations

¹School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

²Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

³Laboratory of Advanced Polymer Materials, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China

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ZHENG Xuan, MING An-jie, YE Li, CHEN Feng-hua, SUN Xi-long, LIU Wei-bing, LI Chao-bo, OU Wen, WANG Wei-bing, CHEN Da-peng. Formaldehyde gas sensor based on TiO₂ thin membrane integrated with nano silicon structure[J]. Optoelectronics Letters, 2016, 12(4): 308

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Paper Information

Received: Dec. 8, 2015

Accepted: --

Published Online: Oct. 12, 2017

The Author Email: An-jie MING (minganjie@ime.ac.cn)

DOI:10.1007/s11801-016-5249-5

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

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