Acta Optica Sinica, Volume. 31, Issue 5, 531001(2011)
Influence of Substrate Temperature on Properties of Aluminum-Doped Zinc Oxide Films Prepared by DC Magnetron Sputtering
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Yang Changhu, Ma Zhongquan, Yuan Jianhui. Influence of Substrate Temperature on Properties of Aluminum-Doped Zinc Oxide Films Prepared by DC Magnetron Sputtering[J]. Acta Optica Sinica, 2011, 31(5): 531001
Paper Information
Category: Thin Films
Received: May. 31, 2010
Accepted: --
Published Online: May. 9, 2011
The Author Email: Changhu Yang (ych.zrwq@163.com)
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