Infrared and Laser Engineering, Volume. 47, Issue 7, 717001(2018)
Multi-parameter measurement method based on combined surface reference
[1] [1] Du Zhengchun, Yang Jianguo, Feng Qibo. Status and trend of geometric error measurement of CNC machine tools [J]. Aircraft Manufacturing Technology, 2017, 525(6): 34-44. (in Chinese)
[2] [2] Gan Bin, Liu Yang, Zhao Yu. An error identification of NC machine tools based on laser Doppler[J]. Journal of Chongqing University of Technology, 2013, 27(3): 56-59. (in Chinese)
[3] [3] Feng Zhiming, Yin Guofu. Research on spatial error modeling and detection method of NC machine tool based on ballbar [J]. Journal of Xihua University: Natural Science Edition, 2014, 33(4): 20-23. (in Chinese)
[4] [4] Li Shuhe, Zhang Guoxiong, Zhang Yiqun. Application of one-dimensional ball in the error detection of NC machine tools [J]. Aviation Precision Manufacturing Technology, 1996, 32(5): 33-36. (in Chinese)
[5] [5] Zhang X D, Wang Q C, Fang F Z, et al. Controllable fabrication of freeform optics [J]. International Journal of Precision Technology, 2013, 3(3): 277-289.
[6] [6] Fang F Z, Zhang X D, Weckenmann A, et al. Manufacturing and measurement of freeform optics[J]. CIRP Annals-Manufacturing Technology, 2013, 62(2): 823-846.
[7] [7] Fang F, Cheng Y, Zhang X. Design of free-form optics[J]. Advanced Optical Technologies, 2013, 2(5): 445-453.
[8] [8] Fang F Z, Zhang X D, Hu X T. Cylindrical coordinate machining of optical freeform surfaces [J]. Optics Express,2008, 16(10): 7323-7329.
[9] [9] Fang Fengzhou, Wan Yu, Zhu Pengzhe, et al. Dimensional displacement measurement system based on optical free surface[J]. Journal of Tianjin University, 2014, 47(10): 934-942. (in Chinese)
[10] [10] Shimizu Y, Tan S L, Murata D, et al. Ultra-sensitive angle sensor based on laser auto-collimation for measurement of stage tilt motions[J]. Optics Express, 2016, 24(3): 2788-2805.
[11] [11] Gao W, Kimura A. A three-axis displacement sensor with nanometric resolution[J]. CIRP Annals-Manufacturing Technology, 2007, 56(1): 529-532.
[12] [12] Gao W, Saito Y, Sato H, et al. Development of a sensitive two-axis micro-angle sensor [J]. Journal of the Japan Society for Precision Engineering Contributed Papers, 2006, 72(9): 1174-1178.
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Li Xinghua, Xing Yanlei, Fang Fengzhou, Liu Peilu, Su Zhikun. Multi-parameter measurement method based on combined surface reference[J]. Infrared and Laser Engineering, 2018, 47(7): 717001
Category: 光电测量
Received: Feb. 5, 2018
Accepted: Mar. 15, 2018
Published Online: Aug. 30, 2018
The Author Email: Xinghua Li (li.xinghua@126.com)