Infrared and Laser Engineering, Volume. 47, Issue 7, 717001(2018)

Multi-parameter measurement method based on combined surface reference

Li Xinghua*, Xing Yanlei, Fang Fengzhou, Liu Peilu, and Su Zhikun
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    In order to solve the problems of complicated process, bulky and expensive apparatuses in multi-dimensional position detection of a moving body, an optical non-contact measurement method of simultaneously measuring four parameters of a moving object was proposed. The system consisted of a combined surface reference composed of a rotating paraboloid and a plane, and an optical probe. Based on the principle of plane mirror reflection and the features of combined surface reference, the angle measurement models of the pitch angle, the yaw angle and the two-dimensional displacements of the moving object were established respectively, and the accuracy evaluation and the repeatability experiments of the system were completed. The experimental results show that the angle accuracy of the system is 1.5″, and the displacement accuracy is 1 μm, laying a foundation for the error identification of machine tools.

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    Li Xinghua, Xing Yanlei, Fang Fengzhou, Liu Peilu, Su Zhikun. Multi-parameter measurement method based on combined surface reference[J]. Infrared and Laser Engineering, 2018, 47(7): 717001

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    Paper Information

    Category: 光电测量

    Received: Feb. 5, 2018

    Accepted: Mar. 15, 2018

    Published Online: Aug. 30, 2018

    The Author Email: Xinghua Li (li.xinghua@126.com)

    DOI:10.3788/irla201847.0717001

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