Acta Photonica Sinica, Volume. 35, Issue 10, 1460(2006)
Research of Measurement and Measuring Error of Laser Interferometer in Step Imprint Lithography
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Liu Hongzhong, Ding Yucheng, Lu Bingheng, Wang Li. Research of Measurement and Measuring Error of Laser Interferometer in Step Imprint Lithography[J]. Acta Photonica Sinica, 2006, 35(10): 1460
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Received: Jun. 5, 2006
Accepted: --
Published Online: Jun. 3, 2010
The Author Email: Hongzhong Liu (lhz329@mailst.xjtu.edu.cn)
CSTR:32186.14.
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