[1] C C LO, W H HSU, C S LIU. Six-degree-of-freedom geometrical errors measurement system with compensation of laser beam drifts and installation errors for linear stage. Optics and Lasers in Engineering, 162, 107407(2023).

[2] [2] 林荣炜， 程真英， 何亚雄， 等. XY工作台六自由度误差在线测量和补偿［J］. 光学 精密工程， 2023， 31（12）： 1761-1773. doi: 10.37188/ope.20233112.1761LINR W， CHENGZH Y， HEY X， et al. On-line six-degree-of-freedom errors measurement and compensation for XY stages［J］. Opt. Precision Eng.， 2023， 31（12）： 1761-1773.（in Chinese）. doi: 10.37188/ope.20233112.1761

[3] [3] 沈正祥， 余俊， 王晓强， 等. 面向激光探测的精密光机系统研制及应用［J］. 光学 精密工程， 2022， 30（21）： 2737-2751. doi: 10.37188/ope.20223021.2737SHENZ X， YUJ， WANGX Q， et al. Development and application of precision optical system for laser detection［J］. Opt. Precision Eng.， 2022， 30（21）： 2737-2751.（in Chinese）. doi: 10.37188/ope.20223021.2737

[4] [4] 龙飞， 郑发家， 贾培智， 等. 激光多自由度同时测量研究现状与发展趋势［J］. 激光与光电子学进展， 2023， 60（3）： 191-208. doi: 10.3788/LOP222597LONGF， ZHENGF J， JIAP ZH， et al. Research status and development trend of laser multi-degree-ofFreedom simultaneous measurement［J］. Laser & Optoelectronics Progress， 2023， 60（3）： 191-208.（in Chinese）. doi: 10.3788/LOP222597

[5] Y D CAI, Q SANG, Z F LOU et al. Error analysis and compensation of a laser measurement system for simultaneously measuring five-degree-of-freedom error motions of linear stages. Sensors, 19, 3833(2019).

[6] [6] 翟玉生， 柳文龙， 王新杰， 等. 激光准直测量中的光漂补偿方法［J］. 激光与光电子学进展， 2019， 56（7）： 198-203. doi: 10.3788/LOP56.071203ZHAIY SH， LIUW L， WANGX J， et al. Methods for laser beam drift compensation in laser alignment measurement［J］. Laser & Optoelectronics Progress， 2019， 56（7）： 198-203.（in Chinese）. doi: 10.3788/LOP56.071203

[7] R J LI, Y J WANG, P TAO et al. Drift reduction of a 4-DOF measurement system caused by unstable air refractive index. Sensors, 20, 6329(2020).

[8] W Z LIU, C ZHANG, F J DUAN et al. A method for noise attenuation of straightness measurement based on laser collimation. Measurement, 182, 109643(2021).

[9] H W YANG, W TAO, X Q YIN et al. Differential correction system of laser beam directional dithering based on symmetrical beamsplitter. Optical Review, 25, 10-17(2018).

[10] P C HU, S MAO, J B TAN. Compensation of errors due to incident beam drift in a 3 DOF measurement system for linear guide motion. Optics Express, 23, 28389-28401(2015).

[11] H CHANG, W Q GE, H C WANG et al. Laser beam pointing stabilization control through disturbance classification. Sensors, 21, 1946(2021).

[12] Z H HU, G Q LIANG, Q L XIU et al. A PID algorithm based on convolutional neural network for pointing stabilization control of synchrotron radiation beams, 13082, 855-860(2024).

[13] Z J NAN, W TAO, H ZHAO. Laser pointing error analysis and compensation method of low-power laser diode source applied to triangulation ranging system. The Review of Scientific Instruments, 92, 103001(2021).

[14] M L WANG, X M DONG, C J QIN et al. Adaptive H^∞ Kalman filter based random drift modeling and compensation method for ring laser gyroscope. Measurement, 167, 108170(2021).

[15] L X ZHANG, R L WANG, W M LIN et al. Compensation method for random drifts of laser beams based on moving average feedback control, 8417, 156-162(2012).

[16] [16] 李结安， 谭久彬， 崔继文. 基于滤波的准直光束漂移反馈补偿方法研究［J］. 光电子·激光， 2013， 24（2）： 336-342.LIJ A， TANJ B， CUIJ W. Study on method of feedback compensation drift of collimation beam based on filter［J］. Journal of Optoelectronics Laser， 2013， 24（2）： 336-342.（in Chinese）

[17] [17] 王亚勇. 激光精密测量中光束抖动抑制技术研究［D］. 大连： 大连理工大学， 2019.WANGY Y. Research on Beam Jitter Suppression Technology in Laser Precision Measurement［D］. Dalian： Dalian University of Technology， 2019. （in Chinese）

[18] [18] 朱东济， 蔡红维， 高蓉. 基于贝叶斯推理的激光光斑漂移特性［J］. 激光与光电子学进展， 2017， 54（4）： 041411. doi: 10.3788/lop54.041411ZHUD J， CAIH W， GAOR. Laser spot drift characteristics based on Bayesian inference［J］. Laser & Optoelectronics Progress， 2017， 54（4）： 041411.（in Chinese）. doi: 10.3788/lop54.041411

[19] N E HUANG, Z H WU. A review on Hilbert-Huang transform： method and its applications to geophysical studies. Reviews of Geophysics, 46, e2007rg000228(2008).