Optics and Precision Engineering, Volume. 17, Issue 5, 969(2009)

Improvement of technological process for surface modification of RB-SiC mirror

SHEN Zhen-feng1...2,*, GAO Jin-song1, WANG Xiao-yi1, WANG Tong-tong1, CHEN Hong1 and ZHENG Xuan-ming1 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(11)

    [1] [1] YANG B X. Research of SiC reflection mirror for space camera[J]. Spacecraft Recovery & Remote Sensing,2003,24(1):15-18. (in Chinese)

    [2] [2] IWONA A P,ISAAC G.Developing SiC for optical system applications[J]. SPIE ,2004,5524:14-20.

    [3] [3] RON E,JAMES R C,COLBY A F J,et al..Cryogenic performance of a lightweight Silicon Carbide mirror[J]. SPIE,2005,58680Q:1-8.

    [4] [4] NOBORU E,DAI Y T,HIROAKI E,et al..Development of SiC ultra light mirror for large space telescope and for extremely huge ground based telescope[J]. SPIE,2003,4842:329-334.

    [7] [7] MATTHEW B M,ROGER A P,JAMES J R. Dimensional stability of bare and coated reaction bonded silicon carbide[J]. SPIE,1990,1335:60-68.

    [9] [9] SHEN ZH F,GAO J S,CHEN H,et al..Research of the surface modification for two kinds of silicon carbide mirror in common use[J].Optical Technique,2009,35(1):21-24.(in Chinese)

    [10] [10] TANG Y X,ZHANG G. The development of fabrication techniques in large scale light-weighted SiC mirror blank[J]. Optical Technique,2007,33(4):510-518. (in Chinese)

    CLP Journals

    [1] ZHAO Yang-yong, LIU Wei-guo, XI Ying-xue. Surface Planarization Process of RB-SiC Based on Magnetron Sputtering and ICP Etching[J]. Acta Photonica Sinica, 2018, 47(3): 324001

    [2] YAN Yong, JIN Guang. Material preparation, surface modification and aspheric processing of RB-SiC mirrors[J]. Optics and Precision Engineering, 2011, 19(8): 1750

    [3] Zhang Feng, Fan Di, Gao Jinsong. Study on Characteristics of Silicon Modification Layer on Silicon Carbide Surface[J]. Laser & Optoelectronics Progress, 2012, 49(3): 32202

    Tools

    Get Citation

    Copy Citation Text

    SHEN Zhen-feng, GAO Jin-song, WANG Xiao-yi, WANG Tong-tong, CHEN Hong, ZHENG Xuan-ming. Improvement of technological process for surface modification of RB-SiC mirror[J]. Optics and Precision Engineering, 2009, 17(5): 969

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 28, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Zhen-feng SHEN (zf_shen@163.com.cn)

    DOI:

    CSTR:32186.14.

    Topics