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Acta Photonica Sinica, Volume. 35, Issue 9, 1412(2006)

Imaging Model for DMD-Based Gray-tone Lithography System

Guo Xiaowei1... Du Jinglei1,*, Luo Boliang1, Guo Yongkang1 and Du Chunlei2 |Show fewer author(s)
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  • 2[in Chinese]
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    Guo Xiaowei, Du Jinglei, Luo Boliang, Guo Yongkang, Du Chunlei. Imaging Model for DMD-Based Gray-tone Lithography System[J]. Acta Photonica Sinica, 2006, 35(9): 1412

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    Paper Information

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    Received: Jun. 2, 2005

    Accepted: --

    Published Online: Jun. 3, 2010

    The Author Email: Jinglei Du (dujinglei@tom.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology