Acta Photonica Sinica, Volume. 35, Issue 9, 1412(2006)
Imaging Model for DMD-Based Gray-tone Lithography System
The characteristic of the gray-tone pattern generated by DMD is discussed and an imaging model for describing the digital gray-tone lithography process is developed. In addition,the effects of DMD operation mode and the parameters of imaging system to the distribution of the exposure dose on the photoresist are simulated and discussed. The model will be helpful for the experimental research on the digital lithography.
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Guo Xiaowei, Du Jinglei, Luo Boliang, Guo Yongkang, Du Chunlei. Imaging Model for DMD-Based Gray-tone Lithography System[J]. Acta Photonica Sinica, 2006, 35(9): 1412
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Received: Jun. 2, 2005
Accepted: --
Published Online: Jun. 3, 2010
The Author Email: Jinglei Du (dujinglei@tom.com)
CSTR:32186.14.