Acta Photonica Sinica, Volume. 35, Issue 9, 1412(2006)

Imaging Model for DMD-Based Gray-tone Lithography System

Guo Xiaowei1, Du Jinglei1、*, Luo Boliang1, Guo Yongkang1, and Du Chunlei2
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  • 1[in Chinese]
  • 2[in Chinese]
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    The characteristic of the gray-tone pattern generated by DMD is discussed and an imaging model for describing the digital gray-tone lithography process is developed. In addition,the effects of DMD operation mode and the parameters of imaging system to the distribution of the exposure dose on the photoresist are simulated and discussed. The model will be helpful for the experimental research on the digital lithography.

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    Guo Xiaowei, Du Jinglei, Luo Boliang, Guo Yongkang, Du Chunlei. Imaging Model for DMD-Based Gray-tone Lithography System[J]. Acta Photonica Sinica, 2006, 35(9): 1412

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    Paper Information

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    Received: Jun. 2, 2005

    Accepted: --

    Published Online: Jun. 3, 2010

    The Author Email: Jinglei Du (dujinglei@tom.com)

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