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Optics and Precision Engineering, Volume. 17, Issue 7, 1602(2009)

Test of nanomechanical properties of single crystal silicon

ZHAO Hong-wei1,*... YANG Bai-hao2, ZHAO Hong-jian3 and HUANG Hu1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    ZHAO Hong-wei, YANG Bai-hao, ZHAO Hong-jian, HUANG Hu. Test of nanomechanical properties of single crystal silicon[J]. Optics and Precision Engineering, 2009, 17(7): 1602

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    Paper Information

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    Received: Mar. 13, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Hong-wei ZHAO (zhaohongwei_jlu@yahoo.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology