Chinese Journal of Lasers, Volume. 41, Issue 4, 416001(2014)
A Method to Measure Off-Axis Fabrication and Off-Axis Angle of Axis Aspheric Mirror Precisely
[4] [4] Zhang Xiaofei, Chen Lizi, Du Shaojun. Optical system design of off-axis three-mirror camera with resolution of 1 m[J]. Laser & Optoelectronics Progress, 2013, 50(6): 134-140.
[5] [5] Liang Shitong, Yang Jianfeng. Aberration analysis and design of four-mirror reflective optical system[J]. Acta Optica Sinica, 2010, 30(11): 3301-3305.
[6] [6] Shigeo Irie, Takeo Watanabe, Hiro Kinoshita, et al.. Development for the alignment procedure of three-asphefical-mirror optics[C]. SPIE, 2000, 3997: 807-813
[7] [7] Katsumi Sugisaki, Tetsuya Oshino, Katsuhiko Murakami, et al.. Assembly and alignment of three aspherical mirror optics for extreme ultraviolet projection lithography[C]. SPIE, 2000, 3997:751-758.
[9] [9] Liu Jianfeng, Long Funian. Study on computer-aided alignment method of off-axis three-mirror system[J]. Optical Technique, 2004, 30(5): 571-576.
[11] [11] Pan Junhua. The Design, Manufacture and Test of the Aspherical Optical Surfaces[M]. Suzhou: Soochow University Press, 2004.
[12] [12] Chen Qinfang. Study on the Technique of Off-Axis Mirrors Test[D]. Beijing: Graduate University of Chinese Academy of Sciences, 2011. 8-20.
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Zhang Xuemin, Wei Ruyi, Yu Tao, Hou Xiaohua, Duan Jiayou, Li Hua. A Method to Measure Off-Axis Fabrication and Off-Axis Angle of Axis Aspheric Mirror Precisely[J]. Chinese Journal of Lasers, 2014, 41(4): 416001
Category: Optical Design and Fabrication
Received: Sep. 13, 2013
Accepted: --
Published Online: Mar. 31, 2014
The Author Email: Xuemin Zhang (zhangxuemin0325@gmail.com)