Chinese Journal of Lasers, Volume. 41, Issue 4, 416001(2014)
A Method to Measure Off-Axis Fabrication and Off-Axis Angle of Axis Aspheric Mirror Precisely
The alignment method of off-axis three-mirror anastigmat combines initial positioning and computer-aided alignment. During manufacturing, due to the limit of testing methods, the off-axis fabrication and off-axis angle cannot be measured precisely. The initial positioning based on the manufacturing off-axis parameter can bring large initial aberration, which can not be converged when using computer-aided alignment. The optical path is analyzed based on the auto-collimation principle, and the mathematic relationship between the position of off-axis mirror and the reflected image is derived. A system based on the relationship is given to measure the off-axis fabrication and off-axis angle, it includes the right angle plate of high precision, linear guides of high precision, the special center orientation tool, internal focusing telescope and self-standardized micro-flat optical tube. The measurement accuracy of off-axis fabrication and off-axis angle is ±0.05mm and ±10″ respectively.
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Zhang Xuemin, Wei Ruyi, Yu Tao, Hou Xiaohua, Duan Jiayou, Li Hua. A Method to Measure Off-Axis Fabrication and Off-Axis Angle of Axis Aspheric Mirror Precisely[J]. Chinese Journal of Lasers, 2014, 41(4): 416001
Category: Optical Design and Fabrication
Received: Sep. 13, 2013
Accepted: --
Published Online: Mar. 31, 2014
The Author Email: Xuemin Zhang (zhangxuemin0325@gmail.com)