Fig. 1. Simplified cross-sectional schematic of a single UV-C μLED presented in this work. Dimensions are not to scale.

Fig. 2. (a) Plan view optical image of the fabricated UV-C μLED array presented in this work and (b) a high-magnification image of the μLEDs.

Fig. 3. J−V and L−J characteristics of a UV-C μLED. The inset shows the emission spectrum of a UV-C μLED at 1768  A/cm2.

Fig. 4. (a) The 3 dB electrical modulation bandwidth of the UV-C μLED as a function of current density; small signal frequency responses of the UV-C μLED at (b) 18 and (c) 71  A/cm2.

Fig. 5. Schematic diagram and optical image of the experimental setup for deep-UV communication using the fabricated UV-C μLED.

Fig. 6. (a) Normalized number of occurrences of transmitted and received symbols assuming the OOK modulation scheme at 800 Mbps and (b) the eye diagram of received symbols assuming the same measurement conditions using the UV-C μLED.

Fig. 7. (a) Measured SNR versus bandwidth for OFDM at JDC=1770  A/cm2 and VPP=7  V. M-QAM constellation symbols received at the photodetector after equalization for M=4, 8, 16 are inserted. (b) Data transmission rate versus BER for OFDM measurement at JDC=1770  A/cm2 and VPP=7  V.