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Acta Optica Sinica, Volume. 32, Issue 8, 822005(2012)

Structure Design and Analysis of a New Type MEMS Fabry-Perot Filter

Zhang Jianfei1,2、*, Zhuang Xuye1, Wang Weimin1, Tao Fenggang1,2, and Yao Jun1
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    Zhang Jianfei, Zhuang Xuye, Wang Weimin, Tao Fenggang, Yao Jun. Structure Design and Analysis of a New Type MEMS Fabry-Perot Filter[J]. Acta Optica Sinica, 2012, 32(8): 822005

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Feb. 20, 2012

    Accepted: --

    Published Online: Jun. 25, 2012

    The Author Email: Jianfei Zhang (zjf425190955@126.com)

    DOI:10.3788/aos201232.0822005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology