Optics and Precision Engineering, Volume. 15, Issue 7, 1016(2007)

Quantitative research onhigher order harmonic suppression in 17

[in Chinese]1... [in Chinese]2, [in Chinese]2, [in Chinese]1, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(19)

    [2] [2] J,WANG SH R,LI F T.Comparisons between radiometric scales on Uv-VUV radiant standard light

    [4] [4] M Q,LI G,CUI C W,et al..Absolute measurement and calculation of flux spectra from the soft

    [5] [5] X-ray beamline of Beijing Synchrotron Radiation Facility[J].High Energy Physics and

    [6] [6] Unclear Physics,1996,20(9):847-853.(in Chinese)

    [8] [8] D,YANG J F.Introduction to Synchrotron Radiation Applications[M].Shanghai:Fudan

    [9] [9] Press,2001.(in Chinese)

    [10] [10] WAKI I,HIRAI Y,MOMOSE A,et al..Higher-harmonics suppressor for soft X

    [11] [11] GULLIKSON E M,MROWKA S,KAUFMANN B B.Recent developments in EUV reflectometry at the

    [12] [12] advanced light source[J].SPIE,2001,4343:363-373.

    [13] [13] QUINN F M,TEEHAN D,MACDONALD M,et al..Higher-order suppression in diffraction-grating

    [14] [14] KUHNE M,MULLER P.Higher order contributions in the synchrotron radiation spectrum of a

    [15] [15] toroidal grating monochromator determined by the use of a transmission

    [17] [17] S,SHAO J H,LU Q P,et al..Reflectivity measuring device in the national synchrotron

    [19] [19] J H,NI Q L,CHEN B.Calibration of soft X-ray detector[J].Opt.Precision

    [20] [20] Eng.,2004,12(1):118-121.(in Chinese)

    [21] [21] GULLIKSON E M,KORDE R L,CANFIELD R,et al..Stable silicon photodiodes for absolute

    [22] [22] intensity measurements in the VUV and soft X-ray regions[J].Journal of Electron

    [23] [23] Spectroscopy and Related Phenomena,1996,80:313-316.

    [25] [25] H J,ZHENG J J,HUO T L,et al..Quantitative research on higher order harmonics in metrology

    CLP Journals

    [1] Zhou Hongjun, Zhong Pengfei, Huo Tonglin, Jiang Xinting, Zheng Jinjin. Cleaning of Carbon Contamination on Si Wafer with Activated Oxygen by Synchrotron Radiation[J]. Acta Optica Sinica, 2010, 30(3): 907

    [2] CHEN Tian-xiang, GAO Na, LI Lin, CHEN Yong, XU Yu-peng, LU Fang-jun. Optical property characterization of optical blocking filters used in space X-ray survey[J]. Optics and Precision Engineering, 2019, 27(11): 2337

    [3] Zhou Hong-jun, Wang Guan-jun, Zheng Jin-jin, Huo Tong-lin. Triple reflector polarizer integrated with suppression of higher order harmonics[J]. Optics and Precision Engineering, 2011, 19(10): 2314

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Quantitative research onhigher order harmonic suppression in 17[J]. Optics and Precision Engineering, 2007, 15(7): 1016

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jan. 11, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

    The Author Email:

    DOI:

    Topics